Support MEMS Low-Noise Vacuum Prober station
Low-noise measuurements in a vacuum is possible
Specification
| Item |
Grail88-MEMS |
| Dimensions |
1230(w) x 1340(d) x 1639(h) |
| Weight |
600kg around |
| Measurement Area |
Entirely within an 8 inch wafer |
| Measurement sample |
Tip(20×20mm)～8,6,4 inch wafer |
| Sample Stage mobility |
XY-axis 200mm,Z-axis 20mm,Θ-axis±10mm around |
| Probe head |
4pieces(max 6pieces) |
| Back Gate |
1 piece |
| Probe Structure |
SMA coaxial probe needle |
| Probe Guard |
Possible |
| Feedthrough |
TRIAX connector |
| Microscope |
X22～150 zoom microscope |
| Measurement noise |
Less than ±50fA |
| Temperature cotrol range |
-45℃～160℃ |
| Vacuum control range |
Atomosphere～10Pa |
| Warranty |
One year after the delivery |
