GRAIL 10-305-X-LV-SCM
Corresponding Vertical magnetic field
Specification(Mechanical Cryogenic prober station)
| Item | GRAIL 10-305-X-LV-SCM |
| Equipment configuration | Cryogenic prover unit×1set He-compressor unit×1set SCM unit×1set |
| Prove body outline dimensions | 960(W)×720(D)×1300(H)(not including protective bumpers) |
| Weight | Prover unit×750kg around He-compressor unit：92kg |
| Cooling method | Sample unit：mechanical two-stage 4k refrigerating machine(model：SRDK305） Compressor air system SCM:liquid helium accumulate system |
| Measured temperature range | Within 10K ～300K |
| Area can be measured | <20mm×20mm |
| Cooling time until the minimum temperature | Within 150 minutes(up to 15K) |
| Temperature Stability *1 | 10K～RT：±0.2K |
| Measurement noise | < ±100fA |
| Sample Stage mobility | our company's envionmental measurement ±2µｍ |
| Probe head | 0-6pieces |
| Probe mobility | X-axis:50mmFS Y,Z-axis:25mmFS |
| Signal connector | TRIAX connectorX(probe quantity＋1）*2 |
| Superconducting magnet | vertical magnetic field ±1.0[T]over Field homogeneity:within Φ10mm within 0.5% Bipolar power supply single phase 200V 10A |
*1)If the temperature sensor is used Si
*2)+1 is for the back gate
